3/3/2011	1:37:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/3/2011	1:37:16 PM	Recipe started at 1:37 PM
3/3/2011	1:37:16 PM	H2 valve closed
3/3/2011	1:37:16 PM	BCl3 valve closed
3/3/2011	1:37:16 PM	PH3 valve closed
3/3/2011	1:37:16 PM	SiCl4 pre valve closed
3/3/2011	1:37:16 PM	SiCl4 post valve closed
3/3/2011	1:37:16 PM	Main Vac valve closed
3/3/2011	1:37:16 PM	Bypass valve closed
3/3/2011	1:37:16 PM	Bubbler valve closed
3/3/2011	1:37:16 PM	Helium valve opened
3/3/2011	1:37:16 PM	Helium MFC set to  500.000000
3/3/2011	1:37:17 PM	H2 MFC set to  0.000000
3/3/2011	1:37:17 PM	BCl3 MFC set to  0.000000
3/3/2011	1:37:17 PM	PHl3 MFC set to  0.000000
3/3/2011	1:37:17 PM	SiCl4 MFC set to  0.000000
3/3/2011	1:37:17 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	1:37:17 PM	Tube furnace set to 0
3/3/2011	1:38:37 PM	Helium valve closed
3/3/2011	1:38:37 PM	H2 valve closed
3/3/2011	1:38:37 PM	BCl3 valve closed
3/3/2011	1:38:37 PM	PH3 valve closed
3/3/2011	1:38:37 PM	SiCl4 pre valve closed
3/3/2011	1:38:37 PM	SiCl4 post valve closed
3/3/2011	1:38:37 PM	Main Vac valve closed
3/3/2011	1:38:37 PM	Bypass valve closed
3/3/2011	1:38:37 PM	Bubbler valve closed
3/3/2011	1:38:37 PM	Helium MFC set to  0.000000
3/3/2011	1:38:37 PM	H2 MFC set to  0.000000
3/3/2011	1:38:37 PM	BCl3 MFC set to  0.000000
3/3/2011	1:38:37 PM	PHl3 MFC set to  0.000000
3/3/2011	1:38:37 PM	SiCl4 MFC set to  0.000000
3/3/2011	1:38:37 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	1:38:37 PM	Tube furnace set to 0
3/3/2011	1:38:37 PM	Run finished at 1:38 PM
3/3/2011	1:38:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/3/2011	1:46:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/3/2011	1:46:49 PM	Recipe started at 1:46 PM
3/3/2011	1:46:49 PM	Helium valve closed
3/3/2011	1:46:49 PM	H2 valve closed
3/3/2011	1:46:49 PM	BCl3 valve closed
3/3/2011	1:46:49 PM	PH3 valve closed
3/3/2011	1:46:49 PM	SiCl4 pre valve closed
3/3/2011	1:46:50 PM	SiCl4 post valve closed
3/3/2011	1:46:50 PM	Main Vac valve closed
3/3/2011	1:46:50 PM	Bubbler valve closed
3/3/2011	1:46:50 PM	Bypass valve opened
3/3/2011	1:46:50 PM	Helium MFC set to  0.000000
3/3/2011	1:46:50 PM	H2 MFC set to  0.000000
3/3/2011	1:46:50 PM	BCl3 MFC set to  0.000000
3/3/2011	1:46:50 PM	PHl3 MFC set to  0.000000
3/3/2011	1:46:50 PM	SiCl4 MFC set to  0.000000
3/3/2011	1:46:50 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	1:46:50 PM	Tube furnace set to 0
3/3/2011	1:47:21 PM	Helium valve closed
3/3/2011	1:47:21 PM	H2 valve closed
3/3/2011	1:47:21 PM	BCl3 valve closed
3/3/2011	1:47:21 PM	PH3 valve closed
3/3/2011	1:47:21 PM	SiCl4 pre valve closed
3/3/2011	1:47:21 PM	SiCl4 post valve closed
3/3/2011	1:47:21 PM	Bubbler valve closed
3/3/2011	1:47:21 PM	Main Vac valve opened
3/3/2011	1:47:21 PM	Bypass valve opened
3/3/2011	1:47:21 PM	Helium MFC set to  0.000000
3/3/2011	1:47:21 PM	H2 MFC set to  0.000000
3/3/2011	1:47:21 PM	BCl3 MFC set to  0.000000
3/3/2011	1:47:21 PM	PHl3 MFC set to  0.000000
3/3/2011	1:47:21 PM	SiCl4 MFC set to  0.000000
3/3/2011	1:47:21 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	1:47:22 PM	Tube furnace set to 0
3/3/2011	1:47:22 PM	Run finished at 1:47 PM
3/3/2011	1:47:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/3/2011	1:52:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/3/2011	1:52:39 PM	Recipe started at 1:52 PM
3/3/2011	1:52:39 PM	H2 valve closed
3/3/2011	1:52:39 PM	BCl3 valve closed
3/3/2011	1:52:39 PM	PH3 valve closed
3/3/2011	1:52:39 PM	SiCl4 pre valve closed
3/3/2011	1:52:39 PM	SiCl4 post valve closed
3/3/2011	1:52:39 PM	Main Vac valve closed
3/3/2011	1:52:39 PM	Bypass valve closed
3/3/2011	1:52:39 PM	Bubbler valve closed
3/3/2011	1:52:39 PM	Helium valve opened
3/3/2011	1:52:39 PM	Helium MFC set to  500.000000
3/3/2011	1:52:39 PM	H2 MFC set to  0.000000
3/3/2011	1:52:39 PM	BCl3 MFC set to  0.000000
3/3/2011	1:52:39 PM	PHl3 MFC set to  0.000000
3/3/2011	1:52:39 PM	SiCl4 MFC set to  0.000000
3/3/2011	1:52:39 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	1:52:39 PM	Tube furnace set to 0
3/3/2011	1:54:00 PM	Helium valve closed
3/3/2011	1:54:00 PM	H2 valve closed
3/3/2011	1:54:00 PM	BCl3 valve closed
3/3/2011	1:54:00 PM	PH3 valve closed
3/3/2011	1:54:00 PM	SiCl4 pre valve closed
3/3/2011	1:54:00 PM	SiCl4 post valve closed
3/3/2011	1:54:00 PM	Main Vac valve closed
3/3/2011	1:54:00 PM	Bypass valve closed
3/3/2011	1:54:00 PM	Bubbler valve closed
3/3/2011	1:54:00 PM	Helium MFC set to  0.000000
3/3/2011	1:54:00 PM	H2 MFC set to  0.000000
3/3/2011	1:54:00 PM	BCl3 MFC set to  0.000000
3/3/2011	1:54:00 PM	PHl3 MFC set to  0.000000
3/3/2011	1:54:00 PM	SiCl4 MFC set to  0.000000
3/3/2011	1:54:00 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	1:54:00 PM	Tube furnace set to 0
3/3/2011	1:54:00 PM	Run finished at 1:54 PM
3/3/2011	1:54:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/3/2011	1:56:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/3/2011	1:56:26 PM	Recipe started at 1:56 PM
3/3/2011	1:56:26 PM	Helium valve closed
3/3/2011	1:56:26 PM	H2 valve closed
3/3/2011	1:56:26 PM	BCl3 valve closed
3/3/2011	1:56:26 PM	PH3 valve closed
3/3/2011	1:56:26 PM	SiCl4 pre valve closed
3/3/2011	1:56:26 PM	SiCl4 post valve closed
3/3/2011	1:56:26 PM	Main Vac valve closed
3/3/2011	1:56:26 PM	Bubbler valve closed
3/3/2011	1:56:26 PM	Bypass valve opened
3/3/2011	1:56:26 PM	Helium MFC set to  0.000000
3/3/2011	1:56:26 PM	H2 MFC set to  0.000000
3/3/2011	1:56:26 PM	BCl3 MFC set to  0.000000
3/3/2011	1:56:26 PM	PHl3 MFC set to  0.000000
3/3/2011	1:56:26 PM	SiCl4 MFC set to  0.000000
3/3/2011	1:56:26 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	1:56:26 PM	Tube furnace set to 0
3/3/2011	1:56:57 PM	Helium valve closed
3/3/2011	1:56:57 PM	H2 valve closed
3/3/2011	1:56:57 PM	BCl3 valve closed
3/3/2011	1:56:57 PM	PH3 valve closed
3/3/2011	1:56:57 PM	SiCl4 pre valve closed
3/3/2011	1:56:57 PM	SiCl4 post valve closed
3/3/2011	1:56:57 PM	Bubbler valve closed
3/3/2011	1:56:57 PM	Main Vac valve opened
3/3/2011	1:56:57 PM	Bypass valve opened
3/3/2011	1:56:57 PM	Helium MFC set to  0.000000
3/3/2011	1:56:57 PM	H2 MFC set to  0.000000
3/3/2011	1:56:57 PM	BCl3 MFC set to  0.000000
3/3/2011	1:56:57 PM	PHl3 MFC set to  0.000000
3/3/2011	1:56:57 PM	SiCl4 MFC set to  0.000000
3/3/2011	1:56:57 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	1:56:58 PM	Tube furnace set to 0
3/3/2011	1:56:58 PM	Run finished at 1:56 PM
3/3/2011	1:56:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/3/2011	1:57:38 PM	Helium MFC set to  20.000000
3/3/2011	1:57:39 PM	Helium valve opened
3/3/2011	1:58:25 PM	Helium valve closed
3/3/2011	1:59:17 PM	Helium valve opened
3/3/2011	2:43:53 PM	Helium valve closed
3/3/2011	2:49:05 PM	Recipe started at 2:49 PM
3/3/2011	2:49:05 PM	Helium valve closed
3/3/2011	2:49:05 PM	BCl3 valve closed
3/3/2011	2:49:05 PM	PH3 valve closed
3/3/2011	2:49:05 PM	SiCl4 pre valve closed
3/3/2011	2:49:05 PM	SiCl4 post valve closed
3/3/2011	2:49:05 PM	Main Vac valve closed
3/3/2011	2:49:05 PM	Bypass valve closed
3/3/2011	2:49:05 PM	Bubbler valve closed
3/3/2011	2:49:05 PM	H2 valve opened
3/3/2011	2:49:05 PM	Helium MFC set to  0.000000
3/3/2011	2:49:05 PM	H2 MFC set to  500.000000
3/3/2011	2:49:05 PM	BCl3 MFC set to  0.000000
3/3/2011	2:49:05 PM	PHl3 MFC set to  0.000000
3/3/2011	2:49:05 PM	SiCl4 MFC set to  0.000000
3/3/2011	2:49:05 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	2:49:05 PM	Tube furnace set to 0
3/3/2011	2:50:28 PM	Helium valve closed
3/3/2011	2:50:28 PM	BCl3 valve closed
3/3/2011	2:50:28 PM	PH3 valve closed
3/3/2011	2:50:28 PM	SiCl4 pre valve closed
3/3/2011	2:50:28 PM	SiCl4 post valve closed
3/3/2011	2:50:28 PM	Main Vac valve closed
3/3/2011	2:50:28 PM	Bypass valve closed
3/3/2011	2:50:29 PM	H2 valve opened
3/3/2011	2:50:29 PM	Bubbler valve opened
3/3/2011	2:50:29 PM	Helium MFC set to  0.000000
3/3/2011	2:50:29 PM	H2 MFC set to  500.000000
3/3/2011	2:50:29 PM	BCl3 MFC set to  0.000000
3/3/2011	2:50:29 PM	PHl3 MFC set to  0.000000
3/3/2011	2:50:29 PM	SiCl4 MFC set to  0.000000
3/3/2011	2:50:29 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	2:50:29 PM	Tube furnace set to 1000
3/3/2011	3:10:29 PM	Helium valve closed
3/3/2011	3:10:29 PM	BCl3 valve closed
3/3/2011	3:10:29 PM	PH3 valve closed
3/3/2011	3:10:29 PM	Main Vac valve closed
3/3/2011	3:10:29 PM	Bypass valve closed
3/3/2011	3:10:29 PM	H2 valve opened
3/3/2011	3:10:29 PM	SiCl4 pre valve opened
3/3/2011	3:10:29 PM	SiCl4 post valve opened
3/3/2011	3:10:29 PM	Bubbler valve opened
3/3/2011	3:10:29 PM	Helium MFC set to  0.000000
3/3/2011	3:10:29 PM	H2 MFC set to  500.000000
3/3/2011	3:10:29 PM	BCl3 MFC set to  0.000000
3/3/2011	3:10:29 PM	PHl3 MFC set to  0.000000
3/3/2011	3:10:29 PM	SiCl4 MFC set to  50.000000
3/3/2011	3:10:29 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	3:10:29 PM	Tube furnace set to 1000
3/3/2011	3:30:29 PM	H2 valve closed
3/3/2011	3:30:29 PM	BCl3 valve closed
3/3/2011	3:30:29 PM	PH3 valve closed
3/3/2011	3:30:29 PM	SiCl4 pre valve closed
3/3/2011	3:30:29 PM	SiCl4 post valve closed
3/3/2011	3:30:29 PM	Main Vac valve closed
3/3/2011	3:30:29 PM	Bypass valve closed
3/3/2011	3:30:29 PM	Helium valve opened
3/3/2011	3:30:29 PM	Bubbler valve opened
3/3/2011	3:30:29 PM	Helium MFC set to  500.000000
3/3/2011	3:30:29 PM	H2 MFC set to  0.000000
3/3/2011	3:30:29 PM	BCl3 MFC set to  0.000000
3/3/2011	3:30:29 PM	PHl3 MFC set to  0.000000
3/3/2011	3:30:29 PM	SiCl4 MFC set to  0.000000
3/3/2011	3:30:29 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	3:30:29 PM	Tube furnace set to 0
3/3/2011	3:58:26 PM	H2 valve closed
3/3/2011	3:58:26 PM	BCl3 valve closed
3/3/2011	3:58:26 PM	PH3 valve closed
3/3/2011	3:58:26 PM	SiCl4 pre valve closed
3/3/2011	3:58:26 PM	SiCl4 post valve closed
3/3/2011	3:58:26 PM	Main Vac valve closed
3/3/2011	3:58:26 PM	Bypass valve closed
3/3/2011	3:58:26 PM	Helium valve opened
3/3/2011	3:58:26 PM	Bubbler valve opened
3/3/2011	3:58:26 PM	Helium MFC set to  500.000000
3/3/2011	3:58:26 PM	H2 MFC set to  0.000000
3/3/2011	3:58:26 PM	BCl3 MFC set to  0.000000
3/3/2011	3:58:26 PM	PHl3 MFC set to  0.000000
3/3/2011	3:58:26 PM	SiCl4 MFC set to  0.000000
3/3/2011	3:58:26 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	3:58:26 PM	Tube furnace set to 0
3/3/2011	3:58:32 PM	Helium valve closed
3/3/2011	3:58:32 PM	H2 valve closed
3/3/2011	3:58:32 PM	BCl3 valve closed
3/3/2011	3:58:32 PM	PH3 valve closed
3/3/2011	3:58:32 PM	SiCl4 pre valve closed
3/3/2011	3:58:32 PM	SiCl4 post valve closed
3/3/2011	3:58:32 PM	Main Vac valve closed
3/3/2011	3:58:32 PM	Bypass valve closed
3/3/2011	3:58:32 PM	Bubbler valve closed
3/3/2011	3:58:32 PM	Helium MFC set to  0.000000
3/3/2011	3:58:32 PM	H2 MFC set to  0.000000
3/3/2011	3:58:32 PM	BCl3 MFC set to  0.000000
3/3/2011	3:58:32 PM	PHl3 MFC set to  0.000000
3/3/2011	3:58:32 PM	SiCl4 MFC set to  0.000000
3/3/2011	3:58:32 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	3:58:32 PM	Tube furnace set to 0
3/3/2011	3:58:33 PM	Run finished at 3:58 PM
3/3/2011	4:00:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/3/2011	4:00:01 PM	Recipe started at 4:00 PM
3/3/2011	4:00:01 PM	Helium valve closed
3/3/2011	4:00:01 PM	H2 valve closed
3/3/2011	4:00:01 PM	BCl3 valve closed
3/3/2011	4:00:01 PM	PH3 valve closed
3/3/2011	4:00:01 PM	SiCl4 pre valve closed
3/3/2011	4:00:01 PM	SiCl4 post valve closed
3/3/2011	4:00:01 PM	Main Vac valve closed
3/3/2011	4:00:01 PM	Bubbler valve closed
3/3/2011	4:00:01 PM	Bypass valve opened
3/3/2011	4:00:01 PM	Helium MFC set to  0.000000
3/3/2011	4:00:01 PM	H2 MFC set to  0.000000
3/3/2011	4:00:01 PM	BCl3 MFC set to  0.000000
3/3/2011	4:00:01 PM	PHl3 MFC set to  0.000000
3/3/2011	4:00:01 PM	SiCl4 MFC set to  0.000000
3/3/2011	4:00:01 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	4:00:01 PM	Tube furnace set to 0
3/3/2011	4:00:32 PM	Helium valve closed
3/3/2011	4:00:32 PM	H2 valve closed
3/3/2011	4:00:32 PM	BCl3 valve closed
3/3/2011	4:00:32 PM	PH3 valve closed
3/3/2011	4:00:32 PM	SiCl4 pre valve closed
3/3/2011	4:00:32 PM	SiCl4 post valve closed
3/3/2011	4:00:32 PM	Bubbler valve closed
3/3/2011	4:00:32 PM	Main Vac valve opened
3/3/2011	4:00:32 PM	Bypass valve opened
3/3/2011	4:00:32 PM	Helium MFC set to  0.000000
3/3/2011	4:00:32 PM	H2 MFC set to  0.000000
3/3/2011	4:00:32 PM	BCl3 MFC set to  0.000000
3/3/2011	4:00:32 PM	PHl3 MFC set to  0.000000
3/3/2011	4:00:32 PM	SiCl4 MFC set to  0.000000
3/3/2011	4:00:32 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	4:00:32 PM	Tube furnace set to 0
3/3/2011	4:00:32 PM	Run finished at 4:00 PM
3/3/2011	4:00:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/3/2011	4:20:22 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/3/2011	4:20:23 PM	Recipe started at 4:20 PM
3/3/2011	4:20:23 PM	H2 valve closed
3/3/2011	4:20:23 PM	BCl3 valve closed
3/3/2011	4:20:23 PM	PH3 valve closed
3/3/2011	4:20:23 PM	SiCl4 pre valve closed
3/3/2011	4:20:23 PM	SiCl4 post valve closed
3/3/2011	4:20:23 PM	Main Vac valve closed
3/3/2011	4:20:23 PM	Bypass valve closed
3/3/2011	4:20:23 PM	Bubbler valve closed
3/3/2011	4:20:23 PM	Helium valve opened
3/3/2011	4:20:23 PM	Helium MFC set to  500.000000
3/3/2011	4:20:23 PM	H2 MFC set to  0.000000
3/3/2011	4:20:23 PM	BCl3 MFC set to  0.000000
3/3/2011	4:20:23 PM	PHl3 MFC set to  0.000000
3/3/2011	4:20:23 PM	SiCl4 MFC set to  0.000000
3/3/2011	4:20:23 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	4:20:23 PM	Tube furnace set to 0
3/3/2011	4:21:42 PM	Helium valve closed
3/3/2011	4:21:42 PM	H2 valve closed
3/3/2011	4:21:42 PM	BCl3 valve closed
3/3/2011	4:21:42 PM	PH3 valve closed
3/3/2011	4:21:42 PM	SiCl4 pre valve closed
3/3/2011	4:21:42 PM	SiCl4 post valve closed
3/3/2011	4:21:42 PM	Main Vac valve closed
3/3/2011	4:21:42 PM	Bypass valve closed
3/3/2011	4:21:42 PM	Bubbler valve closed
3/3/2011	4:21:42 PM	Helium MFC set to  0.000000
3/3/2011	4:21:42 PM	H2 MFC set to  0.000000
3/3/2011	4:21:42 PM	BCl3 MFC set to  0.000000
3/3/2011	4:21:42 PM	PHl3 MFC set to  0.000000
3/3/2011	4:21:42 PM	SiCl4 MFC set to  0.000000
3/3/2011	4:21:42 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	4:21:43 PM	Tube furnace set to 0
3/3/2011	4:21:43 PM	Run finished at 4:21 PM
3/3/2011	4:21:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/3/2011	4:23:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/3/2011	4:24:00 PM	Recipe started at 4:23 PM
3/3/2011	4:24:00 PM	Helium valve closed
3/3/2011	4:24:00 PM	H2 valve closed
3/3/2011	4:24:00 PM	BCl3 valve closed
3/3/2011	4:24:00 PM	PH3 valve closed
3/3/2011	4:24:00 PM	SiCl4 pre valve closed
3/3/2011	4:24:00 PM	SiCl4 post valve closed
3/3/2011	4:24:00 PM	Main Vac valve closed
3/3/2011	4:24:00 PM	Bubbler valve closed
3/3/2011	4:24:00 PM	Bypass valve opened
3/3/2011	4:24:00 PM	Helium MFC set to  0.000000
3/3/2011	4:24:00 PM	H2 MFC set to  0.000000
3/3/2011	4:24:00 PM	BCl3 MFC set to  0.000000
3/3/2011	4:24:00 PM	PHl3 MFC set to  0.000000
3/3/2011	4:24:00 PM	SiCl4 MFC set to  0.000000
3/3/2011	4:24:00 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	4:24:00 PM	Tube furnace set to 0
3/3/2011	4:24:30 PM	Helium valve closed
3/3/2011	4:24:30 PM	H2 valve closed
3/3/2011	4:24:30 PM	BCl3 valve closed
3/3/2011	4:24:30 PM	PH3 valve closed
3/3/2011	4:24:30 PM	SiCl4 pre valve closed
3/3/2011	4:24:30 PM	SiCl4 post valve closed
3/3/2011	4:24:30 PM	Bubbler valve closed
3/3/2011	4:24:30 PM	Main Vac valve opened
3/3/2011	4:24:30 PM	Bypass valve opened
3/3/2011	4:24:30 PM	Helium MFC set to  0.000000
3/3/2011	4:24:30 PM	H2 MFC set to  0.000000
3/3/2011	4:24:30 PM	BCl3 MFC set to  0.000000
3/3/2011	4:24:30 PM	PHl3 MFC set to  0.000000
3/3/2011	4:24:30 PM	SiCl4 MFC set to  0.000000
3/3/2011	4:24:30 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	4:24:31 PM	Tube furnace set to 0
3/3/2011	4:24:31 PM	Run finished at 4:24 PM
3/3/2011	4:24:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/3/2011	4:24:38 PM	Helium MFC set to  20.000000
3/3/2011	4:24:39 PM	Helium valve opened
3/3/2011	4:53:01 PM	Helium valve closed
3/3/2011	4:53:48 PM	Recipe started at 4:53 PM
3/3/2011	4:53:48 PM	Helium valve closed
3/3/2011	4:53:48 PM	BCl3 valve closed
3/3/2011	4:53:48 PM	PH3 valve closed
3/3/2011	4:53:48 PM	SiCl4 pre valve closed
3/3/2011	4:53:48 PM	SiCl4 post valve closed
3/3/2011	4:53:48 PM	Main Vac valve closed
3/3/2011	4:53:48 PM	Bypass valve closed
3/3/2011	4:53:48 PM	Bubbler valve closed
3/3/2011	4:53:48 PM	H2 valve opened
3/3/2011	4:53:48 PM	Helium MFC set to  0.000000
3/3/2011	4:53:48 PM	H2 MFC set to  500.000000
3/3/2011	4:53:48 PM	BCl3 MFC set to  0.000000
3/3/2011	4:53:48 PM	PHl3 MFC set to  0.000000
3/3/2011	4:53:48 PM	SiCl4 MFC set to  0.000000
3/3/2011	4:53:48 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	4:53:48 PM	Tube furnace set to 0
3/3/2011	4:55:11 PM	Helium valve closed
3/3/2011	4:55:11 PM	BCl3 valve closed
3/3/2011	4:55:11 PM	PH3 valve closed
3/3/2011	4:55:11 PM	SiCl4 pre valve closed
3/3/2011	4:55:11 PM	SiCl4 post valve closed
3/3/2011	4:55:11 PM	Main Vac valve closed
3/3/2011	4:55:11 PM	Bypass valve closed
3/3/2011	4:55:11 PM	H2 valve opened
3/3/2011	4:55:11 PM	Bubbler valve opened
3/3/2011	4:55:11 PM	Helium MFC set to  0.000000
3/3/2011	4:55:11 PM	H2 MFC set to  500.000000
3/3/2011	4:55:11 PM	BCl3 MFC set to  0.000000
3/3/2011	4:55:11 PM	PHl3 MFC set to  0.000000
3/3/2011	4:55:11 PM	SiCl4 MFC set to  0.000000
3/3/2011	4:55:11 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	4:55:11 PM	Tube furnace set to 1000
3/3/2011	5:15:11 PM	Helium valve closed
3/3/2011	5:15:11 PM	BCl3 valve closed
3/3/2011	5:15:11 PM	PH3 valve closed
3/3/2011	5:15:11 PM	Main Vac valve closed
3/3/2011	5:15:11 PM	Bypass valve closed
3/3/2011	5:15:11 PM	H2 valve opened
3/3/2011	5:15:11 PM	SiCl4 pre valve opened
3/3/2011	5:15:11 PM	SiCl4 post valve opened
3/3/2011	5:15:11 PM	Bubbler valve opened
3/3/2011	5:15:11 PM	Helium MFC set to  0.000000
3/3/2011	5:15:11 PM	H2 MFC set to  500.000000
3/3/2011	5:15:11 PM	BCl3 MFC set to  0.000000
3/3/2011	5:15:11 PM	PHl3 MFC set to  0.000000
3/3/2011	5:15:11 PM	SiCl4 MFC set to  50.000000
3/3/2011	5:15:11 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	5:15:12 PM	Tube furnace set to 1000
3/3/2011	5:35:12 PM	H2 valve closed
3/3/2011	5:35:12 PM	BCl3 valve closed
3/3/2011	5:35:12 PM	PH3 valve closed
3/3/2011	5:35:12 PM	SiCl4 pre valve closed
3/3/2011	5:35:12 PM	SiCl4 post valve closed
3/3/2011	5:35:12 PM	Main Vac valve closed
3/3/2011	5:35:12 PM	Bypass valve closed
3/3/2011	5:35:12 PM	Helium valve opened
3/3/2011	5:35:12 PM	Bubbler valve opened
3/3/2011	5:35:12 PM	Helium MFC set to  500.000000
3/3/2011	5:35:12 PM	H2 MFC set to  0.000000
3/3/2011	5:35:12 PM	BCl3 MFC set to  0.000000
3/3/2011	5:35:12 PM	PHl3 MFC set to  0.000000
3/3/2011	5:35:12 PM	SiCl4 MFC set to  0.000000
3/3/2011	5:35:12 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	5:35:12 PM	Tube furnace set to 0
3/3/2011	6:04:52 PM	H2 valve closed
3/3/2011	6:04:52 PM	BCl3 valve closed
3/3/2011	6:04:52 PM	PH3 valve closed
3/3/2011	6:04:52 PM	SiCl4 pre valve closed
3/3/2011	6:04:52 PM	SiCl4 post valve closed
3/3/2011	6:04:52 PM	Main Vac valve closed
3/3/2011	6:04:52 PM	Bypass valve closed
3/3/2011	6:04:52 PM	Helium valve opened
3/3/2011	6:04:52 PM	Bubbler valve opened
3/3/2011	6:04:52 PM	Helium MFC set to  500.000000
3/3/2011	6:04:52 PM	H2 MFC set to  0.000000
3/3/2011	6:04:52 PM	BCl3 MFC set to  0.000000
3/3/2011	6:04:52 PM	PHl3 MFC set to  0.000000
3/3/2011	6:04:52 PM	SiCl4 MFC set to  0.000000
3/3/2011	6:04:52 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	6:04:52 PM	Tube furnace set to 0
3/3/2011	6:04:57 PM	Helium valve closed
3/3/2011	6:04:57 PM	H2 valve closed
3/3/2011	6:04:57 PM	BCl3 valve closed
3/3/2011	6:04:57 PM	PH3 valve closed
3/3/2011	6:04:57 PM	SiCl4 pre valve closed
3/3/2011	6:04:57 PM	SiCl4 post valve closed
3/3/2011	6:04:57 PM	Main Vac valve closed
3/3/2011	6:04:57 PM	Bypass valve closed
3/3/2011	6:04:57 PM	Bubbler valve closed
3/3/2011	6:04:57 PM	Helium MFC set to  0.000000
3/3/2011	6:04:57 PM	H2 MFC set to  0.000000
3/3/2011	6:04:57 PM	BCl3 MFC set to  0.000000
3/3/2011	6:04:57 PM	PHl3 MFC set to  0.000000
3/3/2011	6:04:57 PM	SiCl4 MFC set to  0.000000
3/3/2011	6:04:57 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	6:04:57 PM	Tube furnace set to 0
3/3/2011	6:04:57 PM	Run finished at 6:04 PM
3/3/2011	6:06:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/3/2011	6:06:31 PM	Recipe started at 6:06 PM
3/3/2011	6:06:31 PM	Helium valve closed
3/3/2011	6:06:31 PM	H2 valve closed
3/3/2011	6:06:31 PM	BCl3 valve closed
3/3/2011	6:06:31 PM	PH3 valve closed
3/3/2011	6:06:31 PM	SiCl4 pre valve closed
3/3/2011	6:06:31 PM	SiCl4 post valve closed
3/3/2011	6:06:31 PM	Main Vac valve closed
3/3/2011	6:06:31 PM	Bubbler valve closed
3/3/2011	6:06:31 PM	Bypass valve opened
3/3/2011	6:06:31 PM	Helium MFC set to  0.000000
3/3/2011	6:06:31 PM	H2 MFC set to  0.000000
3/3/2011	6:06:31 PM	BCl3 MFC set to  0.000000
3/3/2011	6:06:31 PM	PHl3 MFC set to  0.000000
3/3/2011	6:06:31 PM	SiCl4 MFC set to  0.000000
3/3/2011	6:06:31 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	6:06:31 PM	Tube furnace set to 0
3/3/2011	6:07:02 PM	Helium valve closed
3/3/2011	6:07:02 PM	H2 valve closed
3/3/2011	6:07:02 PM	BCl3 valve closed
3/3/2011	6:07:02 PM	PH3 valve closed
3/3/2011	6:07:02 PM	SiCl4 pre valve closed
3/3/2011	6:07:02 PM	SiCl4 post valve closed
3/3/2011	6:07:02 PM	Bubbler valve closed
3/3/2011	6:07:02 PM	Main Vac valve opened
3/3/2011	6:07:02 PM	Bypass valve opened
3/3/2011	6:07:02 PM	Helium MFC set to  0.000000
3/3/2011	6:07:02 PM	H2 MFC set to  0.000000
3/3/2011	6:07:02 PM	BCl3 MFC set to  0.000000
3/3/2011	6:07:02 PM	PHl3 MFC set to  0.000000
3/3/2011	6:07:02 PM	SiCl4 MFC set to  0.000000
3/3/2011	6:07:02 PM	Bypass solenoid MFC set to  0.000000
3/3/2011	6:07:02 PM	Tube furnace set to 0
3/3/2011	6:07:03 PM	Run finished at 6:07 PM
3/3/2011	6:07:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/3/2011	6:09:33 PM	Helium MFC set to  10.000000
3/3/2011	6:09:34 PM	Helium valve opened
3/3/2011	6:09:44 PM	Helium valve closed
